ECE Header Logo

EEC244A – Design Of Microelectromechanical Systems (Mems)

3 units – Fall Quarter

Lecture: 3 hours

Prerequisite: EEC 140A, EEC 140B or consent of instructor

Grading: Letter; homework (10%), midterm (20%), final (35%), design project (35%).

Catalog Description:

Theory and practice of MEMS design. Micromechanical fundamentals, CAD tools, case studies. A MEMS design project is required. The designs will be fabricated in a commerical foundry and tested in course EEC244B. (Offered in alternate years)

Expanded Course Description:

During the course, the students will design and lay out their own MEMS. The weekly computer-lab sessions and most of the homework will be related to the design project. An important part of the design is a detailed test plan. After the completion of the course the designs will be fabricated in a commercial foundry. In the second course in the series (EEC 244B) the students carry out a thorough characterization of the fabricated devices.

  1. Introduction to MEMS
    1. Bulk micromachining, isotropic and anisotropic etch
    2. Surface micromachining using sacrificial layers
    3. Mechanical Analysis
    4. Role of friction and adhesion in MEMS
  2. Introduction to computer aided design
    1. Basics of layout tool
    2. Design rules
    3. Finite-Elements-Methods for mechanical analysis
  3. MEMS design
    1. Efficient design approaches for parallel processing
    2. Use of test structures
    3. Reliability issues in MEMS
    4. Packaging of MEMS
  4. MEMS interfaces
    1. Capacitive, piezoresitive, piezoelectric and optical interfaces
    2. Effect of noise and environmental influences on interface characteristics
  5. Case studies
    1. Pressure sensors
    2. Accelerometers
    3. Micromachined display
    4. MEMS/IC integration
  6. Design Project


  1. Microsensors, R.S. Muller, R.T. Howe, S.D. Senturia, R.L. Smith, R.M. White, IEEE press 1991.

Instructor: Solgaard


Last revised: June 1997