xyz Positioning Microstages:
MicroPositioning Stages
Researchers: Collins and Gonzalez
 

Schematic diagram of an xyz micropositioning stage mounted on a miniature optical bench.  The bearing surfaces for the translational stages are provided by dovetail MicroJoints micromachined in silicon --shown below.  A dado MicroJoint attaches the z stage to the xy stage.

 
 
 

Photograph of an xyz positioning microstage realized in single crystal silicon.  The microstage is placed between a US penny (right) and a US quarter (left) for size comparison.  Although the microstages can be made as small as 100 microns and as large as many centimeters, we have found the size range shown in the photo to be the most practical.  At this scale, they are smaller than commercially available stages, but still large enough to actually be useful.  The insert (upper left) shows a close up of the xy dovetail MicroJoints used to form the stage's translational bearings

 
 
 

 
 

Photograph shows a pair of xyz microstages with mirrors used to steer a HeNe laser beam.  Microstages are arranged on a 4 inch silicon wafer with an 8 pin dip package shown for size comparison.  Foreground shows a double mirror set.