Micro Photonics System Implementation

University of California, Davis
Department of Electrical Engineering
Micro Instruments and Systems Laboratory

Presented At Transducers 99, Sendai, Japan

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Table of Contents

  1. Micro Photonics System Implementation
  2. Overview
  3. Fourier Transform Spectrometer
  4. Dovetail Fabrication Process
  5. Dovetail Features
  6. Fabricated Dovetail Structures
  7. Microfabricated FTS
  8. Long Range Translation Actuator
  9. Electromagnetic Drive Development
  10. LSM Finite Element Analysis
  11. LSM FEA (cont.)
  12. FEM Results (Single Coil, Current = 0.7A DC )
  13. FEM Results -- Friction Analysis
  14. Coil Design
  15. LSM Fabrication Process
  16. Microfabricated LSM
  17. Test Setup
  18. Open Loop Actuation
  19. Open Loop Actuation
  20. Micro-FTIR Feasibility a) Dovetail Translation Stage b) Conventional Spectrometer
  21. Summary
  22. Acknowledgments
 Author: Andrew P. Wallace 

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