Micro Instruments and Systems Laboratory
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|Microfabricated Linear Electromagnetic Motor:
As part of the development of a micro Fourier Transform Spectrometer, a micro linear translational actuator has been demonstrated. Fabricated with KOH etching of silicon, wafer bonding, gold electroplating, and patternable polyimide, the actuator can provide long range mirror tranlation at a constant velocity. The permanent magnet mounted on the dovetail slider is controlled by electrical coils patterend on the backside of the dovetail structures. Feedback is obtained using a laser reflecting off the mounted mirror to a position sensitive diode. This work has been published at Transducers 99. Links to both the conference paper and presentation are included below.
Note: the background is a microfabricated gold coil
|Diagram of a typical Fourier transform
with Michelson interferometer design. As the mirror
moves a monochromatic light source will experience
a cyclic intensity distribution at the detector due to
|Typical interferogram for a broadband optical
source. At the zero path difference (ZPD) all wavelengths are in
phase and a centerburst occurs.
As the mirror moves past the ZPD, the different wavelengths destructive
|Actual interferograms and Fourier Transformed spectra for a 650nm interference filter. (A). shows the interferogram and Fourier Transformed spectrum obtained for the micromachined FTS. For comparison, (B). shows the interferogram and spectrum for the same filter obtained from a commercial FTS (Brucker).|