EEC147 - Microelectromechanical Systems


4 units - Winter Quarter

Lecture: 2 hours

Lab: 3 hours

Discussion: 1 hour

Prerequisites: Chem 2A, ENG 100 or EEC 100

Grading: Letter

Catalog Description: Introduction to the theory and practice of micro-electromechanical systems (MEMS), including fundamentals of micro-nanofabrication, microscale sensing and actuation, self assembly, microfluidics and lab-on-a-chip. Weekly hands-on laboratory sections are emphasized on implementation and utilization of MEMS technologies. Crosslisiting: Biomedical Engineering 118

Relationship to Outcomes:
Students who have successfully completed this course should have achieved:

Course Outcomes ABET Outcomes

Expanded Course Description:

  1. Microfabrication
  2. Polymer MEMS
  3. Microfluidics
  4. Lab-on-a-Chip
  5. Self Assembly
  6. Piezoresistive Sensor
  7. Capacitive Sensor
  8. Acousitc Sensor
  9. MEMS Applications

Textbook: C. Liu, Foundations of MEMS, Prentice Hall.

Engineering Design Statement:

Professional Component: