EEC147 - Microelectromechanical Systems
4 units - Winter Quarter
Lecture: 2 hours
Lab: 3 hours
Discussion: 1 hour
Prerequisites: Chem 2A, ENG 100 or EEC 100
Grading: Letter
Catalog Description: Introduction to the theory and practice of micro-electromechanical systems (MEMS), including fundamentals of micro-nanofabrication, microscale sensing and actuation, self assembly, microfluidics and lab-on-a-chip. Weekly hands-on laboratory sections are emphasized on implementation and utilization of MEMS technologies. Crosslisiting: Biomedical Engineering 118
Relationship to Outcomes:
Students who have successfully completed this course should have
achieved:
| Course Outcomes | ABET Outcomes |
Expanded Course Description:
- Microfabrication
- Polymer MEMS
- Microfluidics
- Lab-on-a-Chip
- Self Assembly
- Piezoresistive Sensor
- Capacitive Sensor
- Acousitc Sensor
- MEMS Applications
Textbook: C. Liu, Foundations of MEMS, Prentice Hall.
Engineering Design Statement:
Professional Component: