EEC249 – Nanofabrication
3 units – Spring Quarter; alternate years, odd years
Lecture: 3 hours
Prerequisite: Graduate Standing in Engineering
Grading: Letter; homework (20%), term paper and presentation (30%), midterm exam (20%), final exam (30%).
Theory and practices of nanofabrication for producting electronic devices, optoelectionics, sensors, MEMS, Nanostructures, Photonic Crystals, Single-Electron Transistors, Resonators, Phase-Change and Smart Materials. Study of electron-, photon-, and ion-beams and their interactions with solids. Characterization methods and physical limits are examined.
Expanded Course Description:
To provide a rigorous understanding of the theory of nanofabrication processes. Intended to complement the practical education provided by EEC146A/B and EEC246.
- Energetic Sources from Electrons, Ions, and Photons (4 lectures)
- Electron Sources, Optics, and Interactions
- Ion Sources, Optics, and Interactions. Ion Implantation.
- Photon Sources, X-Rays, Optics, and Interactions
- Plasma Processes (5 lectures)
- Vacuum Science
- Plasma Basics, Chemistry, Glow
- Isotropic and reactive ion etching
- Ion milling, focused ion beam (FIB), Chemically-Assisted ion beam etch
- Sputter Deposition (4 lectures)
- targets, substrates, and systems for deposition
- Sputtering gas
- Rates, sputter yields and uniformity
- Comparison with other physical deposition technologies (e.g., evaporation, SOL-GEL, etc.)
- Chemical Vapor Deposition (6 lectures)
- CVD methods and systems
- Vapor-Liquid-Solid (VLS) Growth
- Depostioin of various materials (insulators, semiconductors, conductors)
- Organometallic VPE and Molecular Beam Epitaxy (MBE)
- Pattering (4 lectures)
- Extreme UV Methods
- E-Beam and Ion-Beam Lithography
- Direct-Write Methods
- Characterization Technology (4 lectures)
- Imaging Microscopy, SEM and TEM
- Analytical Microscopy (EDX, SNFOR)
- Raman and FTIR
- Rutherford Backscattering and Channeling
- Auger and XPS
- SIMS and SNMS
- Fundamental Limits to Feature Definition (3 Lectures)
- Quantum Physical Limits
- Materials Limits
- Device, Circuit and System Limits
- The Physics of Micro/NanoFabrication, by I. Brodie and J. Muray, 2nd Ed., Plenum Press.
- Various reviews from the literature
- Notes provided by the Instructor
Instructors: Hunt, Islam
THIS COURSE DOES NOT DUPLICATE ANY EXISTING COURSE.