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EEC244B – Design Of Microelectromechanical Systems (Mems)

3 units – Spring Quarter

Laboratory: 3 hours

Prerequisite: EEC 244A

Grading: Satisfactory/Unsatisfactory; laboratory work (40%) and final report (60%).

Catalog Description:

Testing of surface micromachined MEMS devices including post-processing, design of test fixtures and test methodology, measurements, and data analysis. (Offered in alternate years)

Expanded Course Description:

Students will be testing devices of their own design. The devices were designed as a part of EEC 224A – DESIGN OF MICROELECTROMECHANICAL SYSTEMS (MEMS), and have been fabricated in a commercial foundry.

The course work will include:

  1. Post-processing of fabricated structures including release etch, drying and assembly.
  2. Design of device packaging, test fixtures and measurement methodology.
  3. Characterization of fabricated devices.
  4. Data analysis and final report.

Instructor: Solgaard

THIS COURSE DOES NOT DUPLICATE ANY EXISTING COURSE.

Last revised: February 1997