3 units – Fall Quarter
Lecture: 3 hours
Prerequisite: EEC 140A, EEC 140B or consent of instructor
Grading: Letter; homework (10%), midterm (20%), final (35%), design project (35%).
Theory and practice of MEMS design. Micromechanical fundamentals, CAD tools, case studies. A MEMS design project is required. The designs will be fabricated in a commerical foundry and tested in course EEC244B. (Offered in alternate years)
Expanded Course Description:
During the course, the students will design and lay out their own MEMS. The weekly computer-lab sessions and most of the homework will be related to the design project. An important part of the design is a detailed test plan. After the completion of the course the designs will be fabricated in a commercial foundry. In the second course in the series (EEC 244B) the students carry out a thorough characterization of the fabricated devices.
THIS COURSE DOES NOT DUPLICATE ANY EXISTING COURSE.
Last revised: June 1997