3 units – Winter Quarter
Lecture: 2 hours
Laboratory: 3 hours
Prerequisites: EEC 146A
Fabrication processes for CMOS VLSI. Laboratory projects examine deposition of thin films, ion implantation, process simulation, anisotropic plasma etching, sputter metallization, and C-V analysis. Topics include isolation, projection alignment, epilayer growth, thin gate oxidation, and rapid thermal annealing.
Expanded Course Description
Ten weekly three hour laboratory projects, corresponding to major technologies used in modern CMOS fabrication. Any fabrication procedures used in any given week’s lab correspond to the technology being presented in the lectures that week, thereby providing immediate hands-on experience. A major project in design, fabrication and testing of MOS CV and C-t test devices extends over several lab sessions. Design by using CAD software and testing of devices fabricated according to these designs is a key issue.
Three laboratory projects and two problem sets require the use of turn-key process simulation software, SUPREM-III. This operates on UNIX-based computers. Students need to generate an input file with the text editor and plot/print program results using various output devices.
Engineering Design Statement:
Students are required to specify appropriate desirable operating performance, with justification, of the final device and design the process used to obtain that performance. Problems in the class are open-ended with different approaches being valid according to initial conditions of the IC and the technology chosen. Students learn to design a process to optimize performance and yield, and minimize complexity and parasitic effects. Students are required to compare theory with experimental results and to justify the differences. They are furthermore required to predict where digression from theory is likely to occur and account for this in setting fabrication operating parameters. Several issues of design are beyond simple analysis and therefore require CAD tools. Students must make judgements in setting process variables within the practical confines of the fabrication equipment they will be using.
Relationship to Outcomes:
Students who have successfully completed this course should have achieved:
|Course Outcomes||ABET Outcomes|
|An ability to apply knowledge of mathematics, science, and engineering||A|
|An ability to design and conduct experiments, as well as to analyze and interpret data||B|
|An ability to function on multidisciplinary teams||D|
|An ability to identify, formulate, and solve engineering problems||E|
Engineering Depth, Laboratory
Engineering Science: 1 credit
Engineering Design: 2 credits