3 units – Fall Quarter
Lecture: 2 hours
Laboratory: 3 hours
Prerequisites: EEC 140A
Basic fabrication processes for metal oxide semiconductor (MOS) integrated circuits. Laboratory assignments covering oxidation, photolithography, impurity diffusion, metallization, wet chemical etching, and characterization work together in producing metal-gate PMOS test chips which will undergo parametric and functional testing.
Expanded Course Description:
Ten weekly three hour laboratory projects. The students calculate fabrication process variables and fully fabricate a working MOS test chip. The fabrication procedures used in any given week’s lab correspond to the technology being presented in the lectures that week, thereby providing immediate hands-on experience. Process monitoring and in-progress process variable adjustment and modification are key issues in the lab assignments. Functional and parametric testing of working devices and circuits is performed in the last lab.
Engineering Design Statement:
Since no single process flow is “correct” for obtaining the final IC being processed, students are required to learn to make tradeoffs to optimize the ultimate circuit performance. Most problems in the class are open-ended with different approaches being valid according to initial conditions of the IC and the technology chosen. Students learn to design a process to optimize performance and yield, and minimize complexity and parasitic effects. Students are required to compare theory with experimental results and to justify the differences. They are furthermore required to predict where digression from theory is likely to occur and account for this in setting fabrication operating parameters.
Relationship to Outcomes:
Students who have successfully completed this course should have achieved:
|Course Outcomes||ABET Outcomes|
|An ability to apply knowledge of mathematics, science, and engineering||A|
|An ability to design and conduct experiments, as well as to analyze and interpret data||B|
|An ability to communicate effectively||G|
|An ability to use the techniques, skills, and modern engineering tools necessary for engineering practice.||K|
Engineering Depth, Laboratory
Engineering Science: 1 credit
Engineering Design: 2 credits